Detailed Product Description
Mid-frequency Magnetron Sputtering coater is a kind of low energy consumption and environment friendly machine. Voltaic source ion pulse and mid-frequency magnetron sputtering technology combined together make the equipment widely used. It can avoid strike fire, anode disappear and target poisoning with mid-frequency power source and twins target, increase ionized factor, sputtering speed and deposition speed. It is suitable for coating compound such as SiO2, ZrO2, TiO2, TiN, TiC, TiCN, TiAlN and hard Chrome.
It is used in the decoration field of horologe, glasses, hardware, ceramics, dishware and so on.
Model | ZCK-1150 mid-frequency magnetron sputtering coater |
Chamber size | Φ1150x1200 |
Fixture size | 9shafts,Φ220x900 top rotation |
Pumping time | From atmosphere 8x10-3Pa<12mimunloaded |
Ultimate vacuum | ≤4x10-4Pa |
Voltaic arc source | 8 pieces 2KW |
Mid-frequency target | 1 pair 30KW |
Monopole pulse negative bias | 20KW 100-1000V 20A 50V-500V 40A |
Baking temperature | 350 thermostatic control |
Vacuum system | KT-400(2 sets)/F400/3500 Molecular pump(2 sets),ZJP-300, 2X-70 |
Inflation system | Three ways mass flow controller (500ccm two ways and 1000ccm one way) |
Filament ionized system | Filament heating: 10kw heater bias: 3kw |
Heating system | 18KW |
Total / average power | 50KW/30KW |
Used for | Hardware, electronics and plastic products. |
Remark | Can be designed according to customers request |
