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ZCK-1000 Magnetron Sputtering Vacuum Coating Machine
ZCK-1000 Magnetron Sputtering Vacuum Coating Machine

Detailed Product Description


ZCK-1000 Magnetron Sputtering Vacuum Coating Machine is a kind of low energy and environment friendly machine. ZCK-1000 is a multi-functional vacuum coating machine. Voltaic source ion pulse and mid-frequency magnetron sputtering technology combined together make the equipment widely used. It can avoid strike fire, anode disappear target poisoning, also increase ionized factor, sputtering speed ratio and deposition speed by equipping mid-frequency power source and twins target. It is suitable for coating compound such as SiO2, ZrO2, TiO2, TiN, TiC, TiCN, TiAlN.

It is used for coating horologe, glasses, hardware, ceramics & tableware.

Model

ZCK-1000 magnetron sputtering vacuum coating machine

Chamber size

Φ1000x1100

Fixture size

12shafts,Φ150x900 bottom rotation

Pumping time

From atmosphere to 8x10-3Pa<12min unloaded

Ultimate vacuum

≤4x10-4Pa

Voltaic arc source

5pieces 2KW

Mid-frequency columnar target

1pair 30KW

Monopole pulse negative bias

20KW100-1000V 20A    50V-500V 40A

Baking temperature

350 thermostatic control

Vacuum size  

KT-500,ZJP-300, 2X-70

Inflation system

Three-way flowing controlling500ccm two ways, 1000ccm one way

Filament ionized system

Filament heating power: 10KW  heater bias: 2KW

Heating system

18KW

Total / average power

45KW/25KW

Used for

Hardware, electronics & plastic products

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