Detailed Product Description
TG-S3-model multi-target magnetron box sputtering coater
This machine is sputtering vacuum coater, the vacuum chamber with small-scale pre-open box-type structure, the vacuum chamber size: diam.500mmX400mm. limited Vacuum: 2X10-4Pa.
Main configuration:it can be equipped with 1-4 diam.60mm magnetron target, or can be equipped with 1-3 diam.75mm magnetron target, or can be equipped with 1-3 diam.100mm magnetron target (RF / DC magnetron target), each target has separate substrate heating system, the temperature up to 800 , the substrate can be rotation, when there are multi-targets the substrate can be transferred one by one from a target site adjacent to another site, with a completion of a multi-layer coating the substrate. The machine can be plating a variety of film (single or multi-layer), including functional membrane, particularly suitable for coating magnetic materials. F-250 with molecular pump, 2XZ-15 Direct mechanical pumps.
The aircraft available be used for education and scientific research.for universities, research institutes and factories
