Detailed Product Description
coating machine------TLJ-140 Ion Sputtering Machine is sputtering and etching function. Used scanning electron microscope samples coated conductive film (membrane), the device is easy and simple. Ion sputtering Machine with scanning electron microscopy sample preparation is essential equipment.
Application areas : the ion sputtering, which can also be used for other metal sputtering
Appellation | TLJ-140 Ion sputtering Machine |
Coating method | Ion sputtering |
Vacuum System | Direct rotary vane vacuum pumps 2L/S |
Membrane types | Metal Film |
Sputtering structure | Φ63.5mmCircular plane target |
Glass Processing Unit | 140mm×H140mm |
Taiwan films | Φ40mm Can sample up six cups, water, cleaning able to sample anti-sputtering. |
Up valves | Room at the top coating to facilitate gas. |
Film uniformity | ≤±5% |
Vacuum control | Manual /Automatic Control |
Process gas | Air or argon gas, equipped with argon gas inlet and dedicated micro adjustment for inflation. |
Power | ≥5KW |
