... a touch screen and PLCdevice, a computerized automatic ger-shifting vacuum gauge, a three-flow controller, a contravariant bias power, four ... TiN,TiC,ZrN,Crn,Ti,Ni,Cr,Cu,Au,and Ag etc.but also can be sued for plating S Io2 ... .Intermediate frequency equipment main models and parameters parameters type7008009001000dimension of vacuum chamber700×1000800×1000900×10001000×1000pumping speed1×105Pa~3×10-3Pa ...