... .3%(vertical),0.03%(horizontal) Vertical resolution:0.25μm/4mm,1.25μm/20mm Horizontal resolution:1μm Measuring parameter:vertical ... ,200,500 Vertical magnification:10,20,50,100,200,500,1000,2000 Traversing speed:0.1,0.2,0.5,0.8 ... length:150mm Stylus length:22mm Stylus length:11° Tip radius:25μm Stylus force:0.02-0.06N Detection angle of ...