Specifications

1. Measuring principle:stylus contact method,inductive
2. Measuring range:20mm(vertical),100mm(horizontal)
3. Measuring accuracy:0.3%(vertical),0.03%(horizontal)
4. Vertical resolution:0.25μm/4mm,1.25μm/20mm
5. Horizontal resolution:1μm
6. Measuring parameter:vertical/horizontal distance,included angle,arc radius,chamfer width,distance between circle and X/Y end face,distance between point and line
7. Horizontal magnification:2,5,10,20,50,100,200,500
8. Vertical magnification:10,20,50,100,200,500,1000,2000
9. Traversing speed:0.1,0.2,0.5,0.8,1mm/s
10. Reverse speed: 1.5mm/s
11. Linearity of guideway:1μm/40mm
12. Vertical adjustment of traverse unit:ballscrew system for motor drive,two selectable speeds,auto electrical positioning of pick-up
13. Vertical adjusting height:240mm
14. Measuring stand:granite base 400×600mm
15. Pick-up extension length:150mm
16. Stylus length:22mm
17. Stylus length:11°
18. Tip radius:25μm
19. Stylus force:0.02-0.06N
20. Detection angle of stylus:≤77°(upward),≤88°(downward)