Specifications
1.Measuring principle:stylus contact method,differential inductive pick-up
2.Measuring rangestylus displacement±50μmRt≤80μmRa0.05μm -8μm
3.Indication accuracy:≤±10%
4.Smallest resolution0.005μm
5 Cut-off length 0.25,0.8,2.5mm
6.Assessment lengthN × cut-off,N=1,2,3,4,5
7.Filter typeGaussian,RC,PC
8.Measuring stroke: ±10,±25,±50μm
9.Measuring parameterRa,Rc,Rp,Rv,Rz,Rq,Rsm,Rt,Rsk,Rku,Rdq,Rmr (defined according to GB/T3505-2000)
10.Vertical magnification≤20000
11.Horizontal magnification10/40/100
12.Traversing speed0.15,0.5,1mm/s
13.Pick-up stylusdiamond-90° angle with spherical tip 5μm radius
14.Operating temperature5-40
15.Power supplyIn-built Li-Polymer :rechargeable battery pack(5500mAh), plug-in battery charger
16.Min. module to be tested:2mm