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Si rotary target
Si rotary target

Direct manufactrurer Purity: over 99.999 Best price and quick delivery

Si rotary sputtering target

Raw material

 Purity

Si

99.999

 

Material

Fraction of total mass

Si

>99.99  99.999

Al

</=500ppm

Cu

</=30ppm

Fe

</=350ppm

Mn

</=50ppm

Ni

</=50ppm

Ti

</=70ppm

V

</=30ppm

Zn

</=10ppm

O

</=6000ppm

N

</=1000ppm

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