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Continuous coating production line/ the planar cathode
Continuous coating production line/ the planar cathode

The flat cathode targets R&D is one part of vacuum coating machine.

planar cathode

The flat cathode targets R&D by our company adopt no filament and water-cooled structure with the function of large and long coated. Applicable to all kinds of metal decorative coating, hard feature tools film, plastic parts, large-area glass film etc on the occasion of ion cleaning machine assisted deposition, improving coating adhesion, reduce coating defects and improve gas ionization rate, etc.

Technical parameters

The model specifications

LI-650

LI-950

LI-1100

The effectively deal length

650mm

950mm

1100mm

Beam uniformity

±5%

±5%

±5%

Voltage range

300V-1500V

300V

1500V

Max discharge current

1.2V

1.5V

2v

Cooling  method

Water

Water

Water

Design drawings of the planar cathode

The flat cathode targets R&D is one part of vacuum coating machine.

The flat cathode targets R&D applied to the Continuous coating production line,such as Large area AZO transparent conductive coating production line and Low emissivity inline magnetron sputtering coating line.

Continuous coating production line/ the planar cathode

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