The flat cathode targets R&D is one part of vacuum coating machine.
planar cathode
The flat cathode targets R&D by our company adopt no filament and water-cooled structure with the function of large and long coated. Applicable to all kinds of metal decorative coating, hard feature tools film, plastic parts, large-area glass film etc on the occasion of ion cleaning machine assisted deposition, improving coating adhesion, reduce coating defects and improve gas ionization rate, etc.
Technical parameters
The model specifications | LI-650 | LI-950 | LI-1100 |
The effectively deal length | 650mm | 950mm | 1100mm |
Beam uniformity | ±5% | ±5% | ±5% |
Voltage range | 300V-1500V | 300V | 1500V |
Max discharge current | 1.2V | 1.5V | 2v |
Cooling method | Water | Water | Water |
Design drawings of the planar cathode
The flat cathode targets R&D is one part of vacuum coating machine.
The flat cathode targets R&D applied to the Continuous coating production line,such as Large area AZO transparent conductive coating production line and Low emissivity inline magnetron sputtering coating line.
Continuous coating production line/ the planar cathode