Detailed Product Description
The horizontal/vertical continuous magnetron sputtering AZO film coating product line has 7 vacuum chambers, Part 1 is the entrance chamber; part 2 is entrance buffering chamber; part 3is the entrance transfer chamber, part 4is the process chamber; part 5 is the exit transfer chamber; part 6 is the exit buffering chamber; part 7 is the exit chamber; Two pairs of mid-frequency dual Si target which is controlled by PUC04 closed loop ring form the high-quality SiO2 isolating layer; 10 pairs of column AZO target realize the high-quality AZO transparent conductive film; the dimension of processing in design is the plane base plate materials of 1100mm wide and 1400mm long. The cycle of production and processing can be optimized to 100-180 second. The production has the advanced design which uses the molecular pump to form the atmosphere separation by pumping. Also, it has used the turbo-molecular pump to get high-efficiency isolation, stable pumping speed and even distribution if air.
1.Technical characteristic of production line
A..Equipment type: horizontal/vertical continuous magnetron sputtering coating line.
B..Dimension of carrier: designed according to the substrate of 1×1100mm×1400mm×3mm (can be customized according to requirements).
C. .Design requirements of film uniformity; in area of effective deposit, the uniformity of film thickness±5%.
D..Cathode structure: adopt the mid-frequency dual rotary cathode.
F..Driving mode; adopt the small vertial vehicle which is driven by double friction to load the carrier (vertical) or magnetic steering friction drive (horizontal).
E..Realization of coating technology: adopt the ZnO : AL ceramic target and reactive sputtering deposit technology.
G..Control system: the control system can realize the man-machine dialogue and carry out necessary intervention in production process. During operating process, there are alarm indication and error display; the alarm display can indicate the correct operation and troubleshooting for operators.
H..Control of coating temperature: adopt the stainless sheathed heating device (can use the light tube to heat according to requirements of customers); the highest temperature is 350.Within the range from ambient temperature to 400,it can be designed according the any setting; the stability of control is ±5.
2.Main technical parameters
A..Final vacuum: 6×10E-4Pa
B..Average production cycle: 80-180 seconds/frame.
C..Carrier size: 1100×1400(mm) (can be customized on request).
D..Film uniformity: ±5%.
