Detailed Product Description
These seris include ZHD-230A, ZHD-230B and ZHD-230C. Main technical specifications are as follows:
Vacuum pumps: Diffusion+Vane pump or Molecular pum+Vane pump
Ultimate vacuum: 6.6 ×10-4 Pa(with Diffusion pump) or 6.6 ×10-5 Pa(with Molecular pump)
Evaporation electodes: a pair of water-cooling electrodes
Coating chamber: Dimension:Φ230×H300mm;Material: glass cover; Top-down structure
Pump speed: Pump time20min(Molecular pump)/30min(Diffusion pump), from atmospheric pressure to 10-3 Pa
Film uniformity: The fluctuations of the film thickness are less than 5%
Vacuum measurement: Low-hige digital composite vacuum gauge, from atmospheric pressure to 10-5 Pa
Vacuum control: Manual Control
Sample support: Φ80-100mm, Locates on the top of the chamber
Protection: Alam and automatic protection funtion for water depletion, abnormal flow, over current flowing, over voltage, and electrical shutdown, etc
Basic parameters: Power≥5KW, Served area: 5m2
Working environment and conditions:
1. Power supply: single-phase three-wire AC220V,50Hz,Power≥5KW
2. Independent ground wire: <3Ω
3. Water supply: flowing rate≥10L/min, temperature:283-298K
4. Room temperatureL: ≤303K
5. Relative humidity:<75%
6. No big dust, No corrosive, flammable, explosible gases
7. No obvious vibrations in the room
Optional devices: Water cooling & recycling machine
