1.Very low zero drift 2.It can measure over 60 types of gas 3. RS232 / RS485 / 0-5V / 4-20MA 4.different section control
l Application: Mass Flow Meter and Mass Flow Controller are use to measure and control gas accurately. It’s widely used in fields of Semi-conductor / Vaccume / Solar energy / Analize instrument / photoelectricity / Gas manufactory / Medicare / Power etc.
l Features: Very low zero drift and temperature drift. It can measure over 60 types of gas. User can set medium parameters / customize flow range / customize low pressure difference / real-time curve output. User can select different color. User can collect data into EXCEL form. Controlling form: RS232 / RS485 / 0-5V / 4-20MA / different section control / different section combination / High-low level alarm.
l Technical Data:
1 | Flow range | (0-5,10,20,30,50,100,200,300,500)SCCM(0-1,2,3,5,10,20,30,50,100)SLM |
2 | Accuracy | 1%FS |
3 | Linearity | 0.5%FS |
4 | Repeatability | 0.2%FS |
5 | Responding time | Less than 1s |
6 | Pressure difference | (0.0500.3)Mpa |
7 | Max.Pressure | 10MPa |
8 | Working temperature | 5-65 Centigrade degree |
9 | Input/output | Digital:RS232/RS485Analog: 0-5vdc or 4-20mA |
10 | Power Supply | 7-16vdc,1A |
11 | Weight | 1.0kg |
l Outline figure and conncetion define
l Connection type and pipe size: Swagelok: DN3/6/10, 1/4” 3/8” ….
VCR connector: 1/4” 3/8” 1/8”
l Pipe: S.S.316L / PTFE / Rubber
mass flow controller(mass controller)
