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EMI Magnetron Sputtering Vacuum Coating Machine
EMI Magnetron Sputtering Vacuum Coating Machine

Detailed Product Description


EMI film is applied to laptop, mobile shell, telephone, wireless telecommunications, audiovisual electron, remote controller, navigation, medical tool and ect. The machine is with high-power magnetic control supply, It is fully automatic controlling, double targets alternately, constant flow output. The unique work rest is rotation and revolution and has the advantage of big capacity and high non-defective rate. The machine measures the film thickness accurately by crystal film thickness controller. PLC and touching screen make up the fully automatic controlling system which can modify data at anytime.

Magnetron sputtering (EMI) technical parameter specification

Model

ZCK-1200B

ZCK-1400B

ZCK-1600B

ZCK-1800B

Chamber Size

1200×1500

1400×1950

1600×1950

1800×1950

Coating Film Type

EMI, decorative film

Supply Type

DC magnetic control supply & high voltage ion bombardment supply

Column Target

DC magnetic control target (oxygen-free Cu target & stainless steel target)

Vacuum Chamber

vertical double / single door

Vacuum System

slide valve pump & roots pump & diffusion pump & maintaining pump ( optional

molecular pump, deep cold pump, deep cold system )

Inflation System

mass flow controller(1-3 ways)

Ultimate Vacuum

6×104paunloaded and clean

Pumping Time

from atmosphere to 5×103Pa less than 15 minutes

Rotation

6/8/9shafts rotation and revolution / stepless speed regulation of frequency conversion

Controlling

manual & semi automatic & fully automatic / touching screen & PLC

Remark

can be designed and made according to customers request

The above is for your information only.

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