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PECVD-450 Vacuum Machine
PECVD-450 Vacuum Machine

Detailed Product Description


PECVD-450 Vacuum Equipment is plasma chemical vapor deposition equipment, mainly used in SiO2, Si3N4, amorphous Si : H, polycrystalline Si, SiC, W, Ti-Si, GaAs, GaSb dielectric such as semiconductor and metal film. Plasma-enhanced chemical vapor deposition can be much lower than the temperature of deposition reaction. CVD thermal stability so that the poor may become deposited on the substrate surface. For example, in the low or low melting point of Al softening point on the surface of the polymer substrate for CVD coating. In the high-temperature phase change can occur under the surface of the metal or alloy coating CVD. The lower temperature can effectively inhibit the production of semiconductor devices spread between the layers. The lower deposition temperature, but also can reduce thermal stress mismatch.

Type

PECVD-200

PECVD-450

PECVD-650

Dimension of the deposition chamber

Φ230×H300 mm

Φ450×H400 mm

Φ650×H600 mm

Dimension of the substrate platform

Φ100×10 mm

Φ120×12 mm

Φ150×15 mm

Rotation rate of the substrate platform

0-20 rpm ( adjustable )

Power supply

RF power supply

Vacuum pumps

Molecular pump + Mechanical pump

Highest attained vacuum

6. 6 ×10-5 Pa

Film types

Dielectric / Semiconductor / Metal film

Gas flow control

3-4 Road gas flow control (optional)

Vacuum chamber

Pre-open vertical structures, Under-position pumping systems

Pumping speed

Pumping time≤30 min, from atmospheric pressure to 10-3Pa

Film uniformity

The fluctuations of the film thickness are less than 5%

Vacuum measurement

Digital composite vacuum gauges, Vacuum measurement ranging from atmospheric pressure to 10-6 Pa

Vacuum control

Available Manual / PLC / PLC+HMI Control (optional)

Protection

Alarm and automatic protection function for water depletion, abnormal flow, over current flowing, over voltage, and electrical shutdown, etc.

Basic parameters

Power≥10 KW; Served area: 4-20 m2; Weight 100-800 kg

Optional devices

Water cooling & recycling machine, Residual gas analyzer


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