... a PID temperature control device, two sets of side-installed sputtering targets, and two sets of intermediate frequency power. With its ... of decorative coatings,(not only plated titanium nitride and zirconium nitride,aluminum nitride titanium, chromium nitride coating,etc. nitride ... and nitride, etc. carbonization of the film,titanium, zirconium,gold,silver,aluminium,copper,and so on the metal film ...