... -422-A7)Input frequency:>100KHZ8)Resolution:10um, 5um, 1um, 0.5um, 0.1um9)Operating keyboard: light touch buttons10)Linear scale Grating space ... : 0.04mm,0.02mm, 0.01mm,power supply is +5V.the difference between two ... maximum efficiency. Multi-point compensation can reduce the machine error. 3 digital display and linear optical scale