... with harrow3Pipeline System3.1Air PipelineAir Pre-filter: 316 SS polished casing, filtering core from SHANGHAI FILTER CO., LTD., material: hydrophobic PTFE film, filtering accuracy ... , air flow 0.1m3/minAir Fine-filter (sterilization filter): 316 SS polished casing, filtering core from SHANGHAI FILTER CO., LTD., material: hydrophobic PTFE film, filtering ...