... automatic gear-shifting vacuum gauge, a three-flow controller, a set of contravariant arc power and four-circuit contravariant arc power ... -installed heating tube, a suit of bias power supply,15 set contra-variant arc power supply, it is special equipments for ... ~3×10-3Pa≤20minlimit vacuum≤1×10-3Pasystem form a complete set KT-600×2-2X-30/2X-70×4(ZLD-300 ...