... the coating way, its many advantages quite obvious. As a have a mature technology development, magnetron sputtering has been used in ... iodide target materials, other ceramic target materials, mixed with a oxidation silicon chromium ceramic target materials (Cr-SiO), base- ... target, AlSi, silicon target, Si, copper target Cu, tantalum target T, a, Ge target, Ge, silver target, Ag, cobalt target, Co, ...