... matching degree2. Substrate temperature3. Evaporation rateOxide: a silicon oxide SiO, silica SiO2, TiO2, ZrO2, oxide ... zinc sulfide, ZnS, ZnSe, titanium nitride tin, silicon carbide, lanthanum titanate LaTiO3 and BaTiO3, SrTiO3, ... alloy, titanium aluminides TiAl alloy, copper indium gallium alloy cuinga, copper indium gallium selenium alloy CuInGaSe, zinc aluminum alloy ZnAl, aluminum silicon AlSi alloy ...