... )0~199.9m/s Vibration displacement (P-P)10~200Hz,≤±10% Vibration speed (RMS)10~500Hz,≤±10% Vibration acceleration (O-P)10~1000Hz,≤±10% Vibration displacement (P ... -P)0~20μm,≤±10%≥20μm,≤±5% Vibration speed (RMS)0~2.0mm/s,≤±10%>2.0mm/s,≤±5% Vibration acceleration (O ... -P)0~2.0m/s,≤±10%>2.0m/s,≤±5% Basic function Low ...