... )It is a colorless, tasteless, odorless, non-toxic, non- burning gas with very good stability, heat resistance, excellent electrical insulation and ... solar photoelectricity industy ect.It is a good cleaning gas and etching gas for plasma process.---------------------------------------------PURITY 99.99% 99.999% Nitrogen ... , Deg.F Pressure,psia32 184.470 320 Sulfur hexafluoride SF6 gas SF6