... , a PID temperature control device, two sets of side-installed sputtering targets, and two sets of intermediate frequency power. With its advanced ... electric films such as TiN,TiC,ZrN,Crn,Ti,Ni,Cr,Cu,Au,and Ag etc.but also can be sued ... only plated titanium nitride and zirconium nitride,aluminum nitride titanium, chromium nitride coating,etc. nitride, titanium carbide, zircomium carbide and nitride ...