Product identification Chemical name: 1,1,1,3,3,3-Hexamethyldisilazane Alias: HMDS; Hexamethyldisilazan Product identificationChemical name: 1,1,1,3,3,3-Hexamethyldisilazane Alias: HMDS; HexamethyldisilazaneCAS: 999-97-3EINECS: 213-668-5 ... goods.3. This product is easily hydrolyzed, prone to react with acidic matters violently. Should be kept in sealed container. 1,1,1,3,3,3-Hexamethyldisilazane ...