... frequency equipment main models and parameters parameters type7008009001000dimension of vacuum chamber700×1000800×1000900×10001000×1000pumping speed1× ... , titanium carbide, zircomium carbide and nitride, etc. carbonization of the film,titanium, zirconium,gold,silver,aluminium,copper,and ... TI02 film, etc.)from a variety of materials of the furnace rate of 100 percent, generating film smooth delicate, ...