... large scale integrated circuit manufacturing. As SiH4 / H2, prepared PH3 / H2, such as B2H6 / H2 mixture sty H2Colorless odurless flammable gas. The air ... circuit manufacturing, provide reducing atmosphere, as SiH4 / H2, prepared PH3 / H2, such as B2H6 / H2 mixture style. In electric vacuum devices and materials ... in low temperature material performance test and superconducting study. Hydrogen H2 h2