... Ammonia , Argon, Arsine , Boron Trichloride , Boron Trifluoride, Carbon Dioxide , Carbon Monoxide ,Chlorine , Deuterium Dichlorosilane , Disilane ,Germane, ... Trichlorosilane Trichlorosilane, Tungsten Hexafluoride , Xeon, cylinder , valve , stainless steel valve Boron Trifluoride BF3