... 100mm(horizontal); 2) Measurement accuracy:0.3%(vertical),0.03%(horizontal); 3) Resolution(vertical):0.25μm/4mm, ... : 16 /160 μm (2) Indication error: ≤±5% (3) Smallest resolution: 0.001μm (4) Cut-off length: 0 ... a,λq,R3y,R3z, NR1, NR2,tp (8) Graph analysis: profile--NR, profile--tp curve, amplitude distribution-- ... Pv, Pz, Pq, Pt, Psk, Pku, Pq, Psm (3) Graph analysis: profile--NR, profile--tp curve,etc.